Concepedia

Concept

microelectromechanical systems

Parents

4.7K

Publications

226.8K

Citations

14.2K

Authors

2.1K

Institutions

About

Microelectromechanical systems is a multidisciplinary research and engineering field dedicated to the design, fabrication, and application of integrated devices and systems combining electrical and mechanical functionalities at the micro-scale. This concept investigates the principles governing micro-scale electromechanical phenomena and seeks to create miniaturized sensors, actuators, and systems with significant implications across numerous technological domains.

Top Authors

Rankings shown are based on concept H-Index.

HF

The University of Tokyo

BJ
SO

University of Newcastle Australia

GL

Politecnico di Milano

GK

Carnegie Mellon University

Top Institutions

Rankings shown are based on concept H-Index.

University of California, Berkeley

Berkeley, United States

University of Michigan

Ann Arbor, United States

Georgia Institute of Technology

Atlanta, United States